Editorial board:more details
L. G. Ponomareva
117218, Moskva, Nahimovskiy prosp., 36, korp. 1
+7 (499) 129-54-46
Presence in databases:
Presence of translated version in databases:
PRICE OF A SINGLE PRINTED ISSUE: 1600 rub.
Description of the journal:
The journal publishes articles on technological, physical and scheme-technical aspects of micro- and nanoelectronics. Special attention is paid to new trends in lithography, etching, alloying, concreting and planarization on the submicronic and nano-meter levels, plasma technologies, molecular beam epitaxy and dry etching as well as methods of study and control of surfaces and multilayer structures. It discusses issues of instrument modeling and diagnosis of technological processes in real time.
G.YA. Krasnikov, akademik RAN, d.t.n., prof. - glavnyiy redaktor
V.F. Lukichev – otvetstvennyiy sekretar;
I.G. Neizvestnyiy – zam. glavnogo redaktora;