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Editorial board:

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Managing editor:

L. G. Ponomareva

Editorial address:

117218, Moskva, Nahimovskiy prosp., 36, korp. 1

+7 (499) 129-54-46

Journal's site:

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Требования к оформлению статей


  • ISSN (print): 0544-1269
  • Year of foundation: 1972
  • Subject: Computer science. Information and computing systems
  • Editor-in-chief: akademik Gennadiy YAkovlevich Krasnikov
  • Impact factor (RICC): 0,771
  • Subscription index: 70571
  • Periodicity: 6
  • Russian language title: Микроэлектроника

Presence in databases:

  • RSCI
  • ВАК
  • Science index

Presence of translated version in databases:

  • Scopus


Description of the journal:

The journal publishes articles on technological, physical and scheme-technical aspects of micro- and nanoelectronics. Special attention is paid to new trends in lithography, etching, alloying, concreting and planarization on the submicronic and nano-meter levels, plasma technologies, molecular beam epitaxy and dry etching as well as methods of study and control of surfaces and multilayer structures. It discusses issues of instrument modeling and diagnosis of technological processes in real time.